A Micromachined 38 GHz Schottky-Diode Uniplanar Monolithic Integrated Quasi-Optical Mixer

A GaAs micromachined uniplanar quasioptical mixer is presented for the first time. The main block of the circuit is a membrane-supported double folded slot antenna monolithically integrated with a millimeter-wave Schottky diode. The circuit is designed for the 38 GHz frequency range using coplanar waveguide technology and full-wave electromagnetic simulations and is fabricated on a large GaAs membrane. The mixer is characterized using the isotropic conversion losses parameter and a value of 16 dB was measured.