Method for measuring the refractive index and the thickness of transparent plates by a lateral-shear, wavelength scanning interferometer
Academic Article
Publication Date:
2003
abstract:
An interferometric method is proposed, that can be used to measure simultaneously the thickness and the refractive index of thin films. The experimental set-up employies a lateral-shear interferometer and a DFB laser to scan across the wavelength range
Iris type:
01.01 Articolo in rivista
Keywords:
optics; metrology; thickness; laser; wavelength
List of contributors:
DE NICOLA, Sergio; Ferraro, Pietro
Published in: