Alumina and LTCC Technology for RF MEMS Switches and True Time Delay Lines
Contributo in Atti di convegno
Data di Pubblicazione:
2008
Abstract:
The technology for the realization of RF MEMS ohmic series switches on LTCC substrates has been set up for their implementation in true time delay line configurations. Alumina and LTCC structures for validating the technological process on the individual switches have been obtained and characterized. Static delay lines on LTCC have been manufactured and tested to get the expected electrical performances for the final configuration.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
RF MEMS; LTCC; True Time Delay Lines
Elenco autori:
Catoni, Simone; DE ANGELIS, Giorgio; Marcelli, Romolo
Link alla scheda completa:
Titolo del libro:
Proceedings of the 3rd European Microwave Integrated Circuits Conference, EuMW 2008