CNx thin films grown by pulsed laser deposition: Raman, infrared and X-ray photoelectron spectroscopy study

Carbon nitride films have been deposited by pulsed laser ablation of graphite targets in a controlled nitrogen atmosphere. The samples composition was determined by means of X-ray photoelectron spectroscopy. A study of the C 1s and N 1s core level photoemission bands evidenced, upon increasing nitrogen gas partial pressure, the continuous increase of the nitrogen content, along with a systematic modification of the components related to both trigonal and tetrahedral CN bonding configuration. Nitrogen atomic contents up to 30%, with respect to carbon, were estimated. Raman and Infrared spectroscopy results showed broad and featureless structures typical of an amorphous carbon phase. On the whole they confirm a progressive raise of the number of N atoms bonded to sp2-hybridized C when increasing the nitrogen partial pressure.