Thin films of hexagonal ferrites on Si prepared using MOD processing

The use of metallorganic decomposition for the preparation of polymeric-ceramic precursors has been object of considerable interest. A method used to deposit films on alumina by Ryder et al. has been used to put down a barium hexaferrite film on silicon with an appropriate adhesion layer ( Zr02). The thicknesses of the films were 0.25 11m per spun-on layer. A magnetic and morphological characterization of the films indicates that the best heat treatment after deposition consists of a pyrolysis of the organic constituents at 400 °C followed by crystallization of the hexaferrite at 700 °C. If an oxygen atmosphere was during the crystallization the grain size decreased and the coercive field increased