Hall nano-probes fabricated by focused ion beam

Academic Article

Publication Date:

2006

abstract:

Hall magnetometers with active areas down to 100 × 100 nm2 were fabricated patterning gold and Si-doped GaAs films by focused ion beam. For GaAs probes, electrical characterization shows that the magnetic flux sensitivity is better than 10-2?0 at room temperature. Hall nano-probes made of gold can work down to liquid helium temperature with magnetic flux sensitivity 10-1?0.

Iris type:

01.01 Articolo in rivista

Keywords:

Bulk semiconductor and conductivity oscillation devices (including Hall effect devices; space-charge-limited devices; and Gunn effect devices); III-V semiconductors; Nanoelectronic devices; Semiconductor-device characterization; design; and modeling; Metal and metallic alloys; Nanoscale pattern formation

List of contributors:

DI BONA, Alessandro

Authors of the University:

DI BONA ALESSANDRO

Handle:

https://iris.cnr.it/handle/20.500.14243/243018

Published in:

NANOTECHNOLOGY (BRISTOL. PRINT)

Journal