Supersonic cluster beam synthesis of nanostructured materials

We present the principles of an approach for the synthesis of nanostructured films based on the deposition of supersonic cluster beams. Using a novel pulsed microplasma cluster source, intense and stable cluster beams can be produced allowing film deposition rates up to several nm/min over large surfaces. By separation effects typical of supersonic beams it is possible to select different mass distributions of neutral clusters in the beam, allowing the deposition of thin films with controlled nanostructure. Carbon thin films with interesting functional and structural properties have been deposited by using different precursor clusters.