Publication Date:
1998
abstract:
This chapter discusses the potential of XPS and SAM techniques in the study of semconductors and microelectronic devices
Iris type:
02.01 Contributo in volume (Capitolo o Saggio)
Keywords:
XPS; SAM; Semiconductors
List of contributors:
Paparazzo, Ernesto
Book title:
Handbook of Surface and Interface Analysis