Pure and Lu(III)-doped nanocrystalline ZnO films by CVD

Transparent ZnO thin films were synthesised starting from Zn(C5H7O2)2oxH2O in O2-N2 atmosphere by low pressure CVD (Chemical Vapour Deposition) in the temperature range 350÷500°C. Lu(III)-doped zinc oxide thin films were also prepared, using Lu(C5H7O2)3 as lutetium precursor and starting from suitable Zn(C5H7O2)2oxH2O and Lu(C5H7O2)3 mixtures. The crystallinity and morphology of the films were analyzed by X-ray Diffraction (XRD) and Atomic Force Microscopy (AFM). Their chemical composition was investigated by X-ray Photoelectron and X-ray Excited Auger Electron Spectroscopies (XPS and XE-AES). Optical properties of the films were also studied by UV-Vis-NIR spectroscopy. Pure and nanocrystalline ZnO films with c-axis orientation were obtained for T?450°C. The improved transparency of Lu(III)-doped films was related to the formation of Lu2O3 under the adopted conditions.