Role of Temperature on the Morphology and the Chemical Composition of C-based Nanostructures: From Nanocolumns to Nanotubes
Contributo in Atti di convegno
Data di Pubblicazione:
2007
Abstract:
In this work we report the growth of C-based nanostructures by means of radio-frequency (RF) magnetron sputtering at different temperatures. We found that the deposition temperature has a huge influence on the structure and chem ical composition of the C-based materials obtained. In the temperature range 400 degrees C-600 degrees C we obtain nanocolumns made of carbon and nitrogen (CN(x),), due to the incorporation of the sputtering gas, whilst at a deposition temperature of 700 degrees C the formation of carbon nanotubes (CNT) takes place. The effect of thermal processes on the morphology and the chemical composition of the grown C nanostructures has been investigated by Scanning Electron Microscopy, Transmission Electron microscopy and Raman Spectroscopy.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Elenco autori:
Privitera, Vittorio; Scalese, Silvia; PENNISI DI FLORISTELLA, Agostino
Link alla scheda completa:
Titolo del libro:
15TH IEEE INTERNATIONAL CONFERENCE ON ADVANCED THERMAL PROCESSING OF SEMICONDUCTORS - RTP 2007