Design and analysis of integrated flow sensors by means of a two-dimensional finite element model

A model capable of providing quantitative predictions about the response of integrated thermal flow sensors is presented. The proposed approach exploits the versatility of the FEMLABTM environment to introduce elements of a 3D description into a more computationally efficient 2D model. The simulations described in this work were aimed to check the consistence of the model with measurements performed on a real sensor and evaluate the actual benefits of changing some geometrical parameters with respect to the original configuration.