Compliant nano-pliers as a biomedical tool at the nanoscale: Design, simulation and fabrication

This paper presents the development of a multi-hinge, multi-DoF (Degrees of Freedom) nanogripper actuated by means of rotary comb drives and equipped with CSFH (Conjugate Surface Flexure Hinges), with the goal of performing complex in-plane movements at the nanoscale. The design approach, the simulation and a specifically conceived single-mask fabrication process are described in detail and the achieved results are illustrated by SEM images. The first prototype presents a total overall area of (550 × 550) µm, an active clamping area of (2 × 4) µm, 600 nm-wide circular curved beams as flexible hinges for its motion and an aspect ratio of about 2.5 . These features allow the proposed system to grasp objects a few hundred nanometers in size.