Data di Pubblicazione:
1982
Abstract:
ZnO thin film planar optical waveguides have been realized on 7059 Corning glass substrates using a R.F. sputtering technique. The waveguides are oprically birefringent with the c axis normal to the substrate. The guiding properties have been analized by measuring he effective refraction indices and the relative propagation losses of the TE and TM modes supported by the guides, when excited by a 6328 A He-Ne laser source.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Keywords:
ottica integrata; film sottili; tecniche di sputtering
Elenco autori:
Verardi, Patrizio; Verona, Enrico
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