The influence of low temperature baking on the properties of SrBi2Ta2O9 films from metallorganic solutions

The effects of low temperature baking on properties of SrBizTazOp films have been examined. The morpholgy is strongly influenced by the heat treatment chosen. A slow heating rate and an oxidising atmosphere give films on which larger and inhomogeneous grains were seen by AFM. Additionally, ToF-SIMS shows that this heat treatment increases the chemical homogeneity of the ferroelectric film. Contrasting effects are seen; the furnace treatment increases the remnant polarisation but rapid thermal treatments reduce the leakage currents.