Bending Analysis in AlN-Based Multilayered Piezoelectric Cantilevers

This paper focuses on the design and fabrication of piezoelectric cantilevers and on the analysis of their bending, due to residual stress, as a function of growth parameters and geometrical features. The multilayered cantilevers consist of two top and bottom Molybdenum metals and an Aluminium nitride piezoelectric layer deposited onto a Polysilicon elastic layer using DC magnetron sputtering. After having optimized the growth parameters we fabricate cantilever arrays with different lengths and thicknesses of the Molybdenum and Aluminium nitride layers. The curvature of the fabricated cantilevers is determined by the tip deflection measured by scanning electron microscopy.