The influence of PH3 flow rate on the origin of crystal defects in hydride VPE InP layers
Conference Paper
Publication Date:
1986
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
InP; VPE; TEM
List of contributors:
Salviati, Giancarlo; Attolini, Giovanni; Frigeri, Cesare; Pelosi, Claudio
Book title:
Semiconductor-based heterostructures: interfacial structure and stability