Optical constants of silicon carbide deposited with emerging PVD techniques

Conference Paper
Publication Date:
2009
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/80098
Book title:
SPIE Proc. EUV and X-Ray Optics: Synergy between Laboratory and Space
Published in:
PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
Series