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Gd2O3 nanostructured thin films analyzed by XPS

Articolo
Data di Pubblicazione:
2007
Abstract:
The present work was devoted to the X-ray Photoelectron Spectroscopy (XPS) investigation of the principal core levels of a nanostructured Gd2O3 thin film. The sample was synthesized by Metal Organic Chemical Vapor Deposition (MOCVD) from Gd((iPrN)2CNMe2)3 as precursor at 500°C in an N2/O2 atmosphere. XPS results evidenced a marked Gd2O3 reactivity towards atmospheric CO2 and H2O, leading to a surface composition characterized by the co-presence of gadolinium carbonates/bicarbonates and hydroxides.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
Gd2O3; high-k; thin films; MOCVD; X-ray photoelectron spectroscopy
Elenco autori:
Barreca, Davide
Autori di Ateneo:
BARRECA DAVIDE
Link alla scheda completa:
https://iris.cnr.it/handle/20.500.14243/125973
Pubblicato in:
SURFACE SCIENCE SPECTRA
Journal
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