Nanostructured Dy2O3 films: an XPS investigation

The present investigation is devoted to the X-ray Photoelectron Spectroscopy (XPS) analysis of the main core levels (C1s, O1s, Dy4d, Dy3d) of a representative dysprosium(III) oxide thin film. The specimen was grown on Si(100) at 500°C by Metal Organic Chemical Vapor Deposition (MOCVD) starting from Dy((iPrN)2CNMe2)3 in an N2/O2 atmosphere. The above route yielded uniform and homogeneous nanostructured Dy2O3 films characterized by a remarkable reactivity towards atmospheric CO2 and H2O, resulting in the surface co-presence of gadolinium carbonates/bicarbonates and hydroxides. The most relevant spectral features are presented and discussed.