Curvature and stress analysis in 3C-SiC layers grown on (001) and (111) Si substrates

Conference Poster
Publication Date:
2010
Iris type:
04.03 Poster in Atti di convegno
Keywords:
SiC; growth stress; curvature; VPE
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/99359