TEM, SEM and AFM study of hydrogenated sputtered Si/Ge multilayers

Conference Poster
Publication Date:
2008
Iris type:
04.03 Poster in Atti di convegno
Keywords:
Amorphous multilayers; SiGe; nanostructures
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/99320
Book title:
abstract book