Design of acoustic particle velocity sensors with a coupled 3D-2D finite element model

A coupled 2D-3D finite element model developed with COMSOL Multiphysics software platform is proposed to design novel acoustic particle velocity sensors. The device consists of four silicided polysilicon wires arranged in a Wheatstone full-bridge configuration. Each wire has been divided into three segments placed over suspended silicon dioxide membranes. The dependence of the device sensitivity and frequency response on geometric dimensions has been investigated.