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Manufacturing of metallic micro-components using hybrid soft lithography and micro-electrical discharge machining

Academic Article
Publication Date:
2017
abstract:
In spite of significant improvements in micro-replication techniques, methods to fabricate well-defined net shape microstructures are still in a developing stage. Soft lithography has the capability to manufacture complex micro- and nanostructures. Although it is considered a robust technique, a major limitation is related to the distortion encountered in the fabricated structures during the drying process. In the present work, a manufacturing technology has been developed that emerges the benefits of soft lithography and micro-electrical discharge machining (u-EDM) to produce stainless steel precise micro-components for micro-implantable devices. The micro-parts produced by soft lithography were subsequently surface processed via u-EDM in order to improve the surface quality. In addition to this, it was found that u-EDM drastically improved the surface roughness of stainless steel micro-components from Ra = 3.4 um to Ra = 0.43 um
Iris type:
01.01 Articolo in rivista
Keywords:
micro electrical discharge machining; MEMS; Micro-machining; Soft lithography
List of contributors:
Modica, FRANCESCO GIOVANNI
Authors of the University:
MODICA FRANCESCO GIOVANNI
Handle:
https://iris.cnr.it/handle/20.500.14243/319361
Published in:
INTERNATIONAL JOURNAL, ADVANCED MANUFACTURING TECHNOLOGY
Journal
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URL

http://link.springer.com/article/10.1007%2Fs00170-016-9655-4
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