Publication Date:
2007
abstract:
Coplanar wave-guide grounded lines (CPWG) have been designed for being realized by micromachining of high resistivity silicon wafers. Actually, different configurations have been compared between them by changing the dimensions of micromachined via-holes, as well as their number and separation, to get the optimal electrical matching conditions for CPWG lines. Wide-band matching and low losses have been predicted up to 30 GHz, and preliminary experimental results about the technology have been obtained.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
RF MEMS; Coplanar Waveguides
List of contributors:
Catoni, Simone; DE ANGELIS, Giorgio; Proietti, Emanuela; Lucibello, Andrea; Marcelli, Romolo
Book title:
Proceedings of the 2007 International Semiconducator Conference, IEEE CAS 2007