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Method for reducing the surface roughness of a thin layer of conductive oxides

Patent
Publication Date:
2002
Iris type:
06.01 Brevetto di invenzione industriale
List of contributors:
DI MARCO, PIER GIULIO; Cocchi, Massimo; Fattori, Valeria; Garulli, Alberto; Giro, Gabriele
Authors of the University:
COCCHI MASSIMO
Handle:
https://iris.cnr.it/handle/20.500.14243/183617
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