Competition between Internal and Heavy Doping Gettering Options in epi Silicon

Abstract

Publication Date:

2005

Iris type:

04.02 Abstract in Atti di convegno

Keywords:

Si; gettering; EBIC

List of contributors:

Frigeri, Cesare; Gombia, Enos; Motta, Alberto

Handle:

https://iris.cnr.it/handle/20.500.14243/125408

Book title:

abstract book