Measurements and modeling of pulsed mode flow meter for liquids based on a single chip probe

A flow meter for liquids, based on a temperature control loop integrated on a single chip is presented. The chip is mounted on top of a miniaturized cylindrical heat sink, allowing heat exchange between the chip and the fluid. Cancellation of the fluid temperature term is obtained by means of a pulsed driving method. Results of sensor characterization performed in deionized water are compared with simulations performed by means of a VHDL-AMS model. The effectiveness of an adaptive frequency compensation network in reducing the acquisition time is demonstrated by the model.