Publication Date:
2002
abstract:
A gas flow regulator for ion propulsion systems on board small satellites is proposed. The device is fabricated by means of micromachining techniques and is made up of a silicon die and a borosilicate glass cover joined together by means of anodic bonding. The fabrication process of two different versions of the device is described. The gas mass flow dependence on both the inlet pressure and the absolute temperature is measured and discussed.
Iris type:
01.01 Articolo in rivista
Keywords:
Gas flow regulation; Micromachining; ion propulsion; anodic bonding; silicon
List of contributors:
Piotto, Massimo
Published in: