Erbium-doped crystalline YAG planar and ridge waveguides on quartz and sapphire substrates: deposition and material characterisation

Er-doped Yttrium-Aluminium-Garnet (YAG) planar and ridge waveguides have been grown on quartz and sapphire substrates. The waveguides have been structurally, morphologically and stoichiometrically characterised by X-ray diffraction, atomic force microscopy and X-ray photoelectron spectroscopy. Doping concentrations up to 5% have been successfully demonstrated. Deposition of channel waveguide on sapphire substrate results in a correct ridge shape.