Publication Date:
2004
abstract:
Undoped and doped tin oxide-based microsensors have been prepared by the sol-gel deposition technique. The influence of the ageing of the Ti/Au interdigitated electrical contacts on the responses of the samples has been investigated. In particular, in this paper, we report the responses of different sensors towards some gases as hexanal, acetone and pentanal discussing the reproducibility and repeatability and the baseline drift during the measurements. The sensors showed a little drift probably due to the ageing of the electrical contacts that we observe by SEM images. SEM results were also correlated with XPS analysis.
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Kaciulis, Saulius
Book title:
SENSORS AND MICROSYSTEMS