Free-Standing Silicon Micromachined Resistors from (110) Substrate

Academic Article

Publication Date:

1998

Iris type:

01.01 Articolo in rivista

List of contributors:

Piotto, Massimo

Handle:

https://iris.cnr.it/handle/20.500.14243/173417

Published in:

ALTA FREQUENZA - RIVISTA DI ELETTRONICA

Journal