Structural characterization of Y-Ba-Cu-O films grown by pulsed laser ablation

Epitaxial YBa2Cu3O(x) superconducting films have been grown in-situ by XeCl excimer laser ablation of a sintered pellet. The films, 1000-1500 angstrom thick, were deposited on monocrystalline SrTiO3, LaAlO3, MgO and YSZ substrates. X-ray diffraction and RBS-channeling techniques were used for the structural analysis of the substrates and of the films.