Free standing submicrometric silicon wires fabricated by means of micromachining

Conference Paper
Publication Date:
2002
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/173381
Book title:
Sensors and Microsystems, Proceedings of the 6th Italian Conference on Sensors and Microsystems