A New Process for Silicon Field Emitter Arrays Fabrication Using HF Photoelectrochemical Etching

Abstract
Publication Date:
2001
Iris type:
04.02 Abstract in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/173365
Book title:
Abstracts of 2001 Joint International Meeting the 200th Meeting of The Electrochemical Society, Inc. and the 52nd Annual Meeting of the International Society of Electrochemistry,