Flexible pixel circuits and touch-keypad based on polysilicon TFTs fabricated on polyimide

In this work we present a process to fabricate low-temperature polysilicon (LTPS) TFTs on polyimide (PI) layers, spin-coated on Si-wafer used as rigid carrier. This process has been then used to fabricate elementary circuits (pixel circuits for OLED displays) and a prototype of a touch-keypad on PI. Electrical characterization of the circuits and of the prototype is presented.