Influence of roughness and grain dimension on the optical functions of polycrystalline silicon films
Articolo
Data di Pubblicazione:
1998
Abstract:
A study of amorphous and polycrystalline silicon films deposited at different temperatures is presented. The effect of surface roughness on the quality of the fits to the spectroscopic ellipsometry data is assessed through a comparison with complementary atomic force microscopy images.
Tipologia CRIS:
01.01 Articolo in rivista
Keywords:
polycrystalline silicon; spectroscopic ellipsometry; surface roughness; atomic force microscopy
Elenco autori:
Tallarida, Graziella
Link alla scheda completa:
Pubblicato in: