Porous silicon layer permeated with Sn-V mixed oxides for hydrocarbon sensor fabrication

To realise advanced microsensors for a reliable monitoring of very low concentrations of pollutant species such as NOx, SO2, CO, O-3 and aromatic hydrocarbons, the use of porous silicon (PS) layers permeated with sensing compounds has been explored. For a conformal coating of the inner structure of the PS layer, a wet chemical permeation technique rather than a physical deposition technique has been explored. Mixed semiconducting oxides (Sn-V-O) characterized by peculiar catalytic properties towards hydrocarbons have been used as sensing compound. Results on the morphological, structural, chemical, and electrical characterization of permeated PS layer are presented and discussed.