Low pressure drop, CMOS compatible liquid flow sensor with sub ml/h resolution

Conference Paper
Publication Date:
2009
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
liquid flow sensor; integrated sensor; micromachining
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/68671
Published in:
PROCEDIA CHEMISTRY
Journal