An integrated circuit compatible compact package for thermal gas flowmeters

Conference Paper
Publication Date:
2007
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/68636
Book title:
DTIP of MEMS and MOEMS - Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS