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Growth rate effect on 3C-SiC film residual stress on (100) Si substrates
Academic Article
Publication Date:
2010
Iris type:
01.01 Articolo in rivista
List of contributors:
Severino, Andrea; Anzalone, Ruggero; Saddow, STEPHEN EDWARD; D'Arrigo, GIUSEPPE ALESSIO MARIA; LA VIA, Francesco
Authors of the University:
D'ARRIGO GIUSEPPE ALESSIO MARIA
LA VIA FRANCESCO
Handle:
https://iris.cnr.it/handle/20.500.14243/432123
