Confocal microscopy for the testing of integrated optical devices

Conference Paper
Publication Date:
2003
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/124538
Book title:
Optical and Innovative Microscopy
Published in:
PROCEEDINGS OF SPIE, THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING
Series