Osmium atomic-oxygen protection by an iridium overcoat for increased extreme-ultraviolet grating efficiency

Academic Article

Publication Date:

2003

Iris type:

01.01 Articolo in rivista

List of contributors:

Pelizzo, MARIA GUGLIELMINA

Handle:

https://iris.cnr.it/handle/20.500.14243/201577

Published in:

APPLIED OPTICS

Journal