Publication Date:
1995
abstract:
In order to obtain a rapid and non-destructive method for the evaluation of the thickness of polycrystalline thin films of TiO2 or Ga2O3 deposited on alumina substrates, a procedure based on X-ray absorption, and employing X-ray diffraction at glancing angles, was optimized. The results were compared with SEM observations and an agreement within 25% was obtained.
Iris type:
04.01 Contributo in Atti di convegno
Keywords:
ceramic; thin films; X-ray
List of contributors:
Gerbasi, Rosalba; Porchia, Marina
Book title:
Advances in Inorganic Films and Coatings