Electrical characterization of nanowires fabricated on a Si/SiGe 2DEG
Contributo in Atti di convegno
Data di Pubblicazione:
2001
Abstract:
In the present paper we report the electrical transport characterization of nanowires obtained by electron beam lithography and etching of (100) Si/SiGe heterostructures with a high mobility 2D electron gas.
Tipologia CRIS:
04.01 Contributo in Atti di convegno
Elenco autori:
Castellano, MARIA GABRIELLA; Foglietti, Vittorio; Giovine, Ennio; Notargiacomo, Andrea; Leoni, Roberto; Torrioli, Guido
Link alla scheda completa:
Titolo del libro:
Precision Engineering, Nanotechnology: Proceedings of the Euspen : 2nd International Conference European Society for Precision Engineering and Nanotechnology