Zero-Group-Velocity acoustic waveguides for high-frequency resonators

The propagation of the Lamb-like modes along a silicon-on-insulator (SOI)/AlN thin supported structure was simulated in order to exploit the intrinsic zero group velocity (ZGV) features to design electroacoustic resonators that don't require metal strip gratings or suspended edges to confine the acoustic energy. The ZGV resonant conditions in the SOI/AlN composite plate, ie the frequencies where the mode group velocity vanishes while the phase velocity remains finite, were investigated in the frequency range from few ...