A Novel Flexure Parallel Micromanipulator Based on Multi-Level Displacement Amplifier

The conventional flexure parallel micromanipulators (FPM) usually suffer from small stroke. The performances of a FPM are highly related with the stroke of each actuated limb and the constraints including the non-actuated limbs. To conquer the drawbacks of the small workspace of the conventional FPM, the mechanism for displacement amplification would make a great contribution when it is imported into the design of the actuated limbs. This research is focused on a unique FPM based on multi-level displacement amplifier. Firstly, the structure modeling based on compact modular design is introduced. The macro/micro analysis of the displacement amplifier is conducted. Then, the comprehensive finite-element modeling including the strain and total deformation are implemented to examine the actual mechanical behavior of the proposed mechanism. The developed method and technology provide a promising solution to enhance the performance of the generic FPMs.