RF plasma deposition of SiO2-like films: plasma phase diagnostics and gas barrier film properties optimisation

Academic Article
Publication Date:
2001
Iris type:
01.01 Articolo in rivista
List of contributors:
Authors of the University:
Handle:
https://iris.cnr.it/handle/20.500.14243/7605
Published in:
SURFACE & COATINGS TECHNOLOGY
Journal