Boron-Interstitial cluster kinetics: extraction of binding energies from dedicated experiments
Conference Paper
Publication Date:
2004
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Privitera, Vittorio; Mannino, Giovanni; Scalese, Silvia; Solmi, Sandro
Book title:
SILICON FRONT-END JUNCTION FORMATION-PHYSICS AND TECHNOLOGY