Publication Date:
1984
abstract:
An optical profilometer is presented working on the principle of focus multiplexing by wavelength encoding. Decoding is performed by lateral dispersion. A detector array shows up a signal distribution whose features accurately monitor the surface position of the sample under test. Versatility, accuracy and dynamical range are the most interesting characteristics of this approach.
Iris type:
01.01 Articolo in rivista
Keywords:
OPTICAL INSTRUMENTS
List of contributors:
Poggi, Pasquale; Molesini, Giuseppe; Quercioli, Franco
Published in: