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Focus-wavelength encoded optical profilometer

Academic Article
Publication Date:
1984
abstract:
An optical profilometer is presented working on the principle of focus multiplexing by wavelength encoding. Decoding is performed by lateral dispersion. A detector array shows up a signal distribution whose features accurately monitor the surface position of the sample under test. Versatility, accuracy and dynamical range are the most interesting characteristics of this approach.
Iris type:
01.01 Articolo in rivista
Keywords:
OPTICAL INSTRUMENTS
List of contributors:
Poggi, Pasquale; Molesini, Giuseppe; Quercioli, Franco
Handle:
https://iris.cnr.it/handle/20.500.14243/264383
Published in:
OPTICS COMMUNICATIONS
Journal
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URL

http://www.sciencedirect.com/science/article/pii/0030401884901792
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