Micromachined differential temperature gas flow sensor with on-chip readout electronics

Conference Paper
Publication Date:
2005
Iris type:
04.01 Contributo in Atti di convegno
List of contributors:
Handle:
https://iris.cnr.it/handle/20.500.14243/67770
Book title:
Sensors and Microsystems, Proceedings of the 9th Italian Conference on Sensors and Microsystems